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MEMS Capacitance or Inductance measurement
Does NI notice that the R&D requirement of MEMS sensors with "atto scale capacitance or inductance change?" In the past years, we can only achieve the measurements by MS3110 or Agilent E4980A. But they are not easy to be integrated with other equipments. The operiating or measurement frequency of the sensors, for example MEMS microphone, accelerometer, gyroscope, tactile sensor, is usually DC~100kHz, with aF or aH capacitance or inductance change.
MS3110
http://www.irvine-sensors.com/Chips&Modules.html
On the other hand, which relay type of switch/multiplex/matrix card is proper for the MS3110 or Agilent E4980A with lower capacitance or inductance?
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