Hello KennyTao,
I found the data sheet for the Atmel M2 CL 2014 online and took a look at it. I believe you were looking at Table 3 on page 6 when you said that the minimum high time is 1us.
If you look closer, the 1 you saw in that the table is not saying the minimum integration time is 1us. The 1 actually refers to Note 1 below the table, which says “the integration time is set by the serial line and should be higher than the read-out time (otherwise it is adjusted to the readout time)". So in this case, it looks like the minimum integration time in Free Run mode is 36us (as indicated in MAX when you select this camera file).
In External Trigger mode, the minimum integration time is 5us.
Atmel M2 CL 2014 Data Sheet
http://www.atmel.com/dyn/resources/prod_documents/doc2160.pdf
Allen H.