Hi,
It seems that there is a driver for MKS MFC's at this
link. This driver is not NI certified which means it hasn't been tested by us. I also noticed that it was created in LabVIEW 5.1. Since this VI was created by the manufacturer you could contact them and ask them if they have working versions in newer Versions of LabVIEW. I hope this helps.
Regards
Krista S.
Applications Engineering
National Instruments