Jiang,
It sounds like this could be an overwrite issue. From the file path you specified, I can tell you that the error is occurring in creating the installer for your executable. Are you specifying an installer directory where you have already created an installer of the same name? If so, is that directory read only? Make sure that write privileges are enabled for you installer directory, and if that doesn't fix anything, try specifying a different installer directory.
If none of these suggestions take care of the problem, please post a simple example that illustrates the problem (i.e. a simple VI and a copy of the build file). We can then try to replicate the problem and troubleshoot it. What version of LabVIEW are you using?
Regards,
E. Sulzer
Applications Engineer
National Instruments